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Interface States for Si-Based MOS Devices with an Ultrathin Oxide Layer: X-Ray Photoelectron Spectroscopic Measurements under Biases

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Interface States for Si-Based MOS Devices with an Ultrathin Oxide Layer: X-Ray Photoelectron Spectroscopic Measurements under Biases (English)
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Hikaru Kobayashi
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Toshio Mori
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Yoshihiro Nakato
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Yasushiro Nishioka
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28 February 1995
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34
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Part 1, No. 2B
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959-964
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