(Q63443905)

English

Nanoimprint lithography

article published in 1996

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scholarly article

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Nanoimprint lithography (English)

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author name string

Stephen Y. Chou

1

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publication date

November 1996

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Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena

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14

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6

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4129

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Identifiers

10.1116/1.588605

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