(Q63443906)

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Imprint lithography for integrated circuit fabrication

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title

Imprint lithography for integrated circuit fabrication (English)

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D. J. Resnick

1

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W. J. Dauksher

series ordinal

2

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D. Mancini

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3

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K. J. Nordquist

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4

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T. C. Bailey

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5

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S. Johnson

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6

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N. Stacey

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7

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J. G. Ekerdt

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8

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C. G. Willson

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9

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S. V. Sreenivasan

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10

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N. Schumaker

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11

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publication date

2003

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published in

Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena

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volume

21

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issue

6

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page(s)

2624

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Identifiers

DOI

10.1116/1.1618238

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(Q63443906)

Imprint lithography for integrated circuit fabrication

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