(Q80232143)

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An ultraviolet-curable mold for sub-100-nm lithography

scientific article published on 01 June 2004

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15212499

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title

An ultraviolet-curable mold for sub-100-nm lithography (English)

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15212499

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author name string

Se-Jin Choi

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1

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15212499

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Seung J Baek

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3

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15212499

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Tae W Kim

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4

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English

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Journal of the American Chemical Society

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1 June 2004

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15212499

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published in

Journal of the American Chemical Society

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15212499

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volume

126

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15212499

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25

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15212499

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7744-7745

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DOI

10.1021/JA048972K

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Europe PubMed Central

PubMed publication ID

15212499

reference URL

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:15212499%20AND%20SRC:MED&resulttype=core&format=json

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30 December 2019

PubMed publication ID

15212499

1 reference

stated in

Europe PubMed Central

PubMed publication ID

15212499

reference URL

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:15212499%20AND%20SRC:MED&resulttype=core&format=json

(Q80232143)

An ultraviolet-curable mold for sub-100-nm lithography

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