(Q83915008)

English

Microfabricated torsion levers optimized for low force and high-frequency operation in fluids

scientific article published on 11 May 2006

Statements

Microfabricated torsion levers optimized for low force and high-frequency operation in fluids (English)

Identifiers

 
edit
    edit
      edit
        edit
          edit
            edit
              edit
                edit
                  edit