(Q59001758)

English

Sealed three-dimensional nanochannels

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scholarly article

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Sealed three-dimensional nanochannels (English)

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object named as

S. W. Pang

2

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author name string

R. M. Reano

1

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publication date

2005

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Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena

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23

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6

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2995

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Identifiers

10.1116/1.2121728

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