(Q59002452)

English

Reversal imprinting by transferring polymer from mold to substrate

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scholarly article

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Reversal imprinting by transferring polymer from mold to substrate (English)

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object named as

S. W. Pang

5

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author name string

X. D. Huang

1

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L.-R. Bao

2

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X. Cheng

3

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L. J. Guo

4

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A. F. Yee

6

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publication date

2002

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Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena

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20

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6

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2872

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Identifiers

10.1116/1.1523404

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