Wikidata

(Q59877908)

English

Fluorescence microscopy for quality control in nanoimprint lithography

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title
Fluorescence microscopy for quality control in nanoimprint lithography (English)
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author
Lars Montelius
object named as
L. Montelius
series ordinal
11
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author name string
Ch. Finder
series ordinal
1
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M. Beck
series ordinal
2
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J. Seekamp
series ordinal
3
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K. Pfeiffer
series ordinal
4
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P. Carlberg
series ordinal
5
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I. Maximov
series ordinal
6
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F. Reuther
series ordinal
7
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E.-L. Sarwe
series ordinal
8
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S. Zankovich
series ordinal
9
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J. Ahopelto
series ordinal
10
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C. Mayer
series ordinal
12
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C.M. Sotomayor Torres
series ordinal
13
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publication date
June 2003
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volume
67-68
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page(s)
623-628
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