(Q62571788)

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Nanoscale fluctuations in the distribution of dopant atoms: Dopant-induced dots and roughness of electronic interfaces

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title

Nanoscale fluctuations in the distribution of dopant atoms: Dopant-induced dots and roughness of electronic interfaces (English)

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1

Ph. Ebert

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author name string

N. D. Jäger

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2

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K. Urban

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3

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E. R. Weber

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4

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publication date

2004

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published in

Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena

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volume

22

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issue

4

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page(s)

2018

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DOI

10.1116/1.1771680

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(Q62571788)

Nanoscale fluctuations in the distribution of dopant atoms: Dopant-induced dots and roughness of electronic interfaces

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