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(Q63461377)

English

Nanoimprint lithography in the cyclic olefin copolymer, Topas[sup ®], a highly ultraviolet-transparent and chemically resistant thermoplast

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title
Nanoimprint lithography in the cyclic olefin copolymer, Topas[sup ®], a highly ultraviolet-transparent and chemically resistant thermoplast (English)
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author name string
T. Nielsen
series ordinal
1
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D. Nilsson
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2
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F. Bundgaard
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3
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P. Shi
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4
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O. Geschke
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6
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publication date
2004
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volume
22
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issue
4
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page(s)
1770
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Identifiers

DOI
10.1116/1.1771665
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