(Q57310633)

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Three-dimensional imaging of pore structures inside low-κ dielectrics

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Three-dimensional imaging of pore structures inside low-κ dielectrics (English)

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Huolin L. Xin

1

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James R Engstrom

object named as

James R. Engstrom

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4

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David A. Muller

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David A. Muller

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5

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author name string

Peter Ercius

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2

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Kevin J. Hughes

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3

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language of work or name

English

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publication date

31 May 2010

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published in

Applied Physics Letters

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volume

96

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issue

22

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page(s)

223108

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cites work

Characterization of pore structure in a nanoporous low-dielectric-constant thin film by neutron porosimetry and X-ray porosimetry.

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Crossref

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https://api.crossref.org/works/10.1063%2F1.3442496

retrieved

21 January 2018

3D electron microscopy in the physical sciences: the development of Z-contrast and EFTEM tomography

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Crossref

reference URL

https://api.crossref.org/works/10.1063%2F1.3442496

retrieved

21 January 2018

Annular Dark Field Tomography in TEM

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reference URL

https://api.crossref.org/works/10.1063%2F1.3442496

retrieved

21 January 2018

Beam spreading and spatial resolution in thick organic specimens

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reference URL

https://api.crossref.org/works/10.1063%2F1.3442496

retrieved

21 January 2018

Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography

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Crossref

reference URL

https://api.crossref.org/works/10.1063%2F1.3442496

retrieved

21 January 2018

Visualizing the 3D internal structure of calcite single crystals grown in agarose hydrogels

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Crossref

reference URL

https://api.crossref.org/works/10.1063%2F1.3442496

retrieved

21 January 2018

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DOI

10.1063/1.3442496

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(Q57310633)

Three-dimensional imaging of pore structures inside low-κ dielectrics

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